90° Elbows for Vacuum System: High Conductance & Low Outgassing

Product Description

90° elbows for vacuum system are precision-engineered fittings designed to redirect gas flow while maintaining system integrity from rough vacuum to ultra-high vacuum (UHV) levels. Unlike standard plumbing elbows, these vacuum-rated components feature smooth internal radii, minimal trapped volumes, and vacuum-grade surface finishes to prevent virtual leaks and reduce outgassing.

Manufactured from low-carbon stainless steel (304L or 316L), these elbows are critical for vacuum chambers, pumping lines, analytical instruments, and semiconductor equipment. Each 90° elbow is fabricated with strict attention to weld quality, internal surface condition, and flange alignment. Whether you are constructing a new vacuum manifold, modifying a deposition system, or repairing a leak detection station, these elbows deliver the conductance and reliability that demanding vacuum applications require.

Key Features & Characteristics

• Bend Angle: 90 degrees (custom angles also available)

• Bend Radius: Long radius (1.5× DN) or short radius (1.0× DN)

• Vacuum Range: Atmospheric to 1×10⁻⁹ Torr (UHV compatible)

• Flange Standards: ISO-KF, ISO-K, CF (ConFlat), or custom configurations

• Material: 304L / 316L stainless steel (low magnetic permeability)

• Internal Surface Finish: Ra ≤ 0.8 µm (electropolished or mechanically polished)

• Outgassing Rate: < 2×10⁻⁸ Torr·L/s·cm² (after vacuum cleaning)

• Leak Integrity: Helium leak tested to < 1×10⁻⁹ mbar·L/s

• Bakeout Capability: Up to 400°C (CF flanges with metal seals)

• Connections: Both rotatable and fixed flange options

Applications

• Vacuum pumping lines: Connecting turbo pumps to foreline or chamber ports

• Thin-film deposition: Sputtering, evaporation, and ALD systems

• Helium leak detection: Redirecting flow between test ports and detectors

• Analytical instruments: Mass spectrometers, electron microscopes, surface analysis tools

• Semiconductor equipment: Load locks, transfer chambers, and process modules

• R&D vacuum manifolds: Complex multi-port arrangements

• Space simulation: Thermal vacuum chamber plumbing

Why Choose Our 90° Elbows for Vacuum Systems?

We combine CNC-controlled tube bending with orbital welding and electropolishing to deliver vacuum elbows that meet or exceed international clean vacuum standards. Every elbow is helium leak tested, ultrasonically cleaned with semiconductor-grade detergents, and double-bagged in a cleanroom environment. Custom bend radii, non-standard flange orientations, and special lengths are available with engineering support.